고순도, 초고순도 99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999% (2N, 3N, 3N5, 4N, 4N5, 5N, 6N), FPD용, 반도체용 (PVD코팅), 기록미디어용 (광, 광광자기 기록등) 등
알루미늄타겟 Al, 마그네슘타겟 Mg, 티타늄타겟 Ti, 니켈타겟 Ni, 텅스텐타겟 W, 몰리브덴타겟 Mo, 크롬타겟 Cr, 지르코늄타겟 Zr, 탄탈륨타겟 Ta, 니오븀타겟 Nb, 팔라듐타겟 Pd, 골드타겟 Au, 실버타겟 Ag, 동타겟 Cu 등 각종 금속 타게트 - 인듐주석산화물 (ITO : Indium Tin Oxide)
- 판 (후판, 박판), 플레이트 (plate), 시트판 (sheet), 판재 (시트, 쉬트), 코일 coil, 스트립 (띠 strip, 밴드 band, 리본 ribbon), 포일 (호일 foil), 롤 (roll), 디스크판 (디스크 disc, 서클판, 원형판 disk), 합금판 alloy sheet, 클래드판 clad sheet, 고순도 스퍼터링타겟 high purity sputtering target
- 봉 (바 bar, 로드 rod), 봉재 (환봉 round bar, 사각봉 square bar), 파이프 pipe (튜브 tube), 와이어 (선 wire 선재), 와이어메쉬 wiremesh (메시 mesh, 메쉬망, 메시망 mesh cloth), 합금봉 alloy rod, 용접봉 welding electrod
- 링 ring, 브라켓 bracket, 피팅류 fitting, 패스너 fastener, 볼트 bolt, 너트 nut, 리벳 rivet, 나사 screw, 핀 pin, 필라멘트 filament, 미러 mirror, 부품, 박스 box, 케이스 case, 콘덴서 캐패시터 커패시터 capacitor, 슬리브 sleeve, 반사판 reflector panel, 게터 (getter)
- 도가니 crucible, 도가니라이너 crucible liner, 챔버 chamber, 실린더 cylinder, 보울 bowl, 보트 boat, 금형 mould, 블록 block,
- 메탈 metal, 합금메탈 alloy metal, 모합금, 잉고트 ingot, 빌렛 billet, 펠렛 pellet, 과립 그래뉼 granule, 칩 chip, 편상 플레이크 flake, 괴상 럼프 lump, 브리켓 briqutte, 볼 ball, 스폰지 sponge, 스크랩 scrap, 분말 파우더 powder
- 스퍼터링타겟 (Sputtering Targets) -
Target 분류
품목 Item
표식
순도 Purity
귀금속
(Precious Metal)
스퍼터링타겟
Gold target 금타겟
Au target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Gold/Germanium target
금/게르마늄타겟
Au/Ge target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Silver target 은타겟
Ag target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Palladium target 팔라듐타겟
Pd target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Platinum target 백금타겟
Pt target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Ruthenium target 루테늄타겟
Ru target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
특수금속
(Special Metal)
스퍼터링타겟
Copper target 동타겟
Cu target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Tungsten target 텅스텐타겟
W target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Molybdenum target 몰리브덴타겟
Mo target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Tantalum target 탄탈륨타겟
Ta target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Niobium target 니오븀타겟
Nb target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Zirconium target 지르코늄타겟
Zr target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Hafnium target 하프늄타겟
Hf target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
순수 알루미늄 및 알루미늄 합금
(Pure Aluminum / Aluminium Alloy)
스퍼터링타겟
Aluminum target 알루미늄타겟
Al target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Aluminum/Silicon target
Al/Si타겟
Al/Si target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Aluminum/Copper target
Al/Cu타겟
Al/Cu target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Aluminum/Silicon/Copper target target
Al/Si/Cu타겟
Al/Si/Cu target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
순수 티타늄 및 티타늄 합금
(Pure Titanium / Titanium Alloy)
스퍼터링타겟
Titanium target 티타늄타겟
Ti target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Titanium/Aluminium target
Ti/Al타겟
Ti/Al target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Titanium / Tungten target
Ti/W타겟
Ti/W target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
순수 니켈 및 니켈 합금
(Pure Nickel / Nickel Alloy)
스퍼터링타겟
Nickel target 니켈타겟
Ni target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Nickel/Chromium target Ni/Cr타겟
Ni/Cr target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Nickel/Vanadium target
Ni/V타겟
Ni/V target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Nickel/Iron target
Ni/Fe타겟
Ni/Fe target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
순수 크롬 및 크롬켈 합금
(Pure Chromium / Chromium Alloy)
스퍼터링타겟
Chromium target 크롬타겟
Cr target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Chromium/Aluminium target
Cr/Al타겟
Cr/Al target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
순수 코발트 및 코발트 합금
(Pure Cobalt /Cobalt Alloy)
스퍼터링타겟
Cobalt target 코발트타겟
Co target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Cobalt/Nickel target
Co/Ni타겟
Co/Ni target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Cobalt/Platinum target
Co/Pt타겟
Co/Pt target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
기타 금속
(Other Metals)
스퍼터링타겟
Zinc target 아연타겟
Zn target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Tin target 주석타겟
Sn target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Bismuth target 비스무트타겟
Bi target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Magnesium target 마그네슘타겟
Mg target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
철
(Ferrous Metal)
스퍼터링타겟
Iron target 철타겟
Fe target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Manganese target 망간타겟
Mn target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
세라믹타겟
(Ceramic Target)
스퍼터링타겟
Indium/Tin Oxide target
ITO타겟
ITO target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Zinc Aluminum Oxide target
AZO타겟
AZO target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Silicon Dioxide target SiO2타겟
SiO2 target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Titanium Dioxide target TiO2타겟
TiO2 target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Aluminum Oxide target Al2O2타겟
Al2O3 target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Magnesium Oxide target MgO타겟
MgO target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Barium Oxide target BaO타겟
BaO target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Zinc Oxide target ZnO타겟
ZnO target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
반금속 (Semi-Metal)
스퍼터링타겟
Silicon target 실리콘타겟
Si target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Silicon Carbonide target SiC타겟
SiC target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Silicon Nitride target Si3N4타겟
Si3N4 target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Germanium target 게르마늄타겟
Ge target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Carbon target 카본타겟
C target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Selenium target 셀레늄타겟
Se target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Tellurium target 테루륨타겟
Te target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
희토류금속
(Rare Earth Metal)
스퍼터링타겟
Lanthanum target 란탄타겟
La target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Cerium target 세륨타겟
Ce target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Praseodymium target 프라세디뮴타겟
Pr target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Neodymium target 네오디뮴타겟
Nd target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Samarium target 사마륨타겟
Sm target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Europium target 유로퓸타겟
Eu target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Gadolinium target 가돌늄타겟
Gd target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Terbium target 터비윰타겟
Tb target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Dysprosium target 디프로슘타겟
Dy target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
Holmium target 홀뮴타겟
Ho target
99%, 99.9%, 99.95%, 99.99%, 99.995%, 99.999%, 99.9999%
(2N, 3N, 3N5, 4N, 4N5, 5N, 6N)
취급품
주요 스퍼터링타겟 (평판형 planar, 디스크형 disc, 로타리형 rotary)
세라믹타겟
AZO, GZO, IZO, IWO, ITO, IGZO, GAZO, ZTO, i-ZnO, CdS, Nb2Ox, Nb2O5, SnO2, SiO, SiO2, TiOx, Al2O3, Bi2O3, CrO, Er2O3, HfO2, MgO, Nd2O3, NiO, Sc2O3, Sm2O3, Ta2O5, TiO2, Ti3O5, V2O5, Y2O3, ZnO, ZrO2, BaF2, CaF2, CeF3, KF, LaF3, MgF2, NaF, BaO3Ti, SrTiO3, ZnS, SiN, TiN, AiN, BN, SiC, 등
합금타겟
Mo-Nb, MoNb, Al-Si, SiAl, Al-Si-Mg, Al-Si-Cu, AlNd, Zn-Al, Co-base Alloy, Cu-base Alloy, CuGa, CuInGa, Ni-Cr, NiCr, Ni-Cr-Al, Ni-Fe, NiCu, Ni-V, Ti-Al, TiAl, Ti-Cr, Cr-V, Fe-Mn, In-Sn, NiV, InSn, ZnAl, ZnSn, TaNb 등
금속타겟
Al, Bi, Cd, Co, Cr, Cu, Fe, Ge, In, Mg, Mn, Mo, Nb, Ni, Pb, Sb, Se, Si, Sn, Ta, Te, Ti, W, Zn, Zr 등
로타리 타켓
Al, Ti, Si, AZO, GZO, TiOx, Cr, SiAl, ZnSn, NiV 등
LED (전자증착)
Al slug, Ti slug, Ni slug, ITO slug 등
* 순수 금속타겟, 합금타겟, 산화물타겟, 세라믹타겟, 백킹플레이트 BP 본딩 작업
- 고순도 금속 스퍼터링 타겟 : 알루미늄 (Al, 알미늄), 마그네슘 (Mg), 티타늄 (Ti, 티탄), 니켈 (Ni), 텅스텐 (W), 몰리브덴 (Mo, 몰리), 탄탈륨 (Ta, 탄탈), 니오븀 (Nb, 니오브), 지르코늄 (Zr, 지르콘), 하프늄 (Hf), 인듐 (In), 이리듐 (Ir), 크롬 (Cr), 코발트 (Co), 레늄 (Re), 바나듐 (V), 팔라듐 (Pd), 백금 (Pt, 플래티늄), 은 (Ag), 금 (Au), 구리 (Cu), 망간 (Mn), 주석 (Sn), 아연 (Zn), 납 (Pb), 실리콘 (Si, 규소), 철 (Fe), 비스무트 (Bi), 게르마늄 (Ge), 스칸듐 (Sc), 로듐 (Rh), 란탄 (La), 세륨 (Ce), 네오디뮴 (Nd), 사마륨 (Sm) 등
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